Forschungsberichte 2006-2007

Neue Materialien

Becker, H.; Renno, M.; Heß, G.; Buttgereit, U.; Koepernik, C.; Nedelmann, L.; Irmscher, M.; Birkner, R.; Zibold, A.; Scheruebl, T.
Process window enhancement for 45 nm node using alterable transmission phase shifting materials
Photomask Technology; Part 1 / Martin, P.M.; Naber, R.J., eds., Bellingham, WA: SPIE, 2006, article no. 63490J, 10 p. - (Proceedings of SPIE ; 6349)
Burkert, A.; Triebel, W.; Natura, U.; Martin, R.
Microchannel formation in fused silica during ArF excimer laser irradiation
Physics and Chemistry of Glasses: European Journal of Glass Science and Technology B48. 2007 (3), p. 107-112
Letz, M.; Parthier, L.
Charge centers in CaF2: ab initio calculation of elementary physical properties
Physical Review B 74. 2006, article no. 064116-1, 9 p.
Natura, U.; Keutel, D.; Letz, M.; Parthier, L.; Knapp, K.
Investigations regarding the prevention of depolarization of ArF excimer laser irradiation by CaF2 laser optics
Optical Microlithography XX, Parts 1-3, San José, CA / Flagello, D.G., ed., Bellingham, WA: SPIE, 2007. - (Proceedings of SPIE ; 6520)