Applications of MEMpax®
Pressure sensors
MEMpax® is ideal for use in pressure sensors. Available as unpolished and structured wafer, MEMpax® acts as a pedestal that carries the functional MEMS die. These are widely used in the sectors automotive, industry and transportation and healthcare, where SCHOTT has established a long-standing and trusted presence.
MEMS mirrors
MEMpax® is widely used as a window in various MEMS mirror applications due to its unique thermal, optical, cosmetic and geometric properties. A thermal match to silicon opens up the possibility for anodic bonding to enable hermetic packages, while the availability of low thicknesses offers smaller form factors and improved optical application designs. In addition, the pristine surface can be combined with effective anti-reflective coatings.
RF IC packaging
Since SCHOTT MEMpax® has the lowest dielectric constant of all thin glasses on the market, it is ideal for applications involving very high (>30GHz) frequencies. Due to the low roughness and low TTV of MEMpax® glass, it is an excellent choice for radio frequency integrated circuits.
Diagnostics and biotechnology
Optimum sensitivity is vital in the fields of diagnostics and biotechnology, and the high optical transmission and low autofluorescence of SCHOTT MEMpax® makes it ideal for use in a range of devices and equipment. Whether it’s biochip substrates, microfluidics, or Lab On A Chip systems, MEMpax® offers a low signal-to-noise ratio and excellent surface quality.
