FLEXINITY®
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Technical Details of FLEXINITY®

Thanks to microscale structuring and a surface that supports flawless joining, FLEXINITY® offers an impressive range of technical standards. A key component for miniaturized, high-performing systems, its customization potential makes any shape possible, providing a variety of opportunities for new technology.

Powerful, accurate and highly customizable

Ultra-fine structure

FLEXINTY® is available in a wide thickness range of 0.1 - 3.3 mm. While its structuring width can go down to 25 μm radius, its lateral size can be structured up to 600 mm, with a position tolerance down to ± 3 µm depending on specific application requirements.

Outstanding reliability

Thanks to its specific wall conditions, FLEXINTY® offers ultra-high mechanical strength in combination with adjusted thermal expansion for high reliability and yield.

Superb surface quality

The firm glass-silicon bonded stack of FLEXINITY® structured wafers is supported by the high quality of its surface. The exceptional fire-polished finish results in high durability, no matter which glass type is used in whatever application.

Create it your way

SCHOTT offers FLEXINITY® in a range of glass types. D 263® can be delivered as structured sheet, panel, or wafer, and offers strong transmittance in the VIS to NIR range combined with a high CTE, while AF 32® eco provides high thermal stability and a low dielectric loss factor.
FLEXINITY® structuring properties
FLEXINITY® connect structuring properties
FLEXINITY® mini structuring properties
FLEXINITY® level structuring properties
FLEXINITY® materials

SCHOTT FLEXINITY® - Structured Glass Solutions

Standard structuring capabilities*  
Thickness range (depending on glass type) 0.1 – 3.3 mm
Format Max. 600 mm in diameter (round, square)
Layout  Through structures according to customer specifications
Structuring radius Down to 25 μm
Minimum dimension of structure element 100 μm
Feature size tolerance < 20 μm (equiv. ± 10 μm)
Wall taper angle 90 ° ± 0.5 °
Edge exclusion zone ≥ 3 mm
Position tolerance of features < 20 μm (equiv. ± 10 μm)
 Bridge width between structure elements Down to 100 μm

*) limitations in feature design and demands deviating from these capabilities will be evaluated upon request

SCHOTT FLEXINITY® connect - Structured Glass Solutions

Structures  
Thickness range (depending on glass type) ~ 0.2 – 1.1 mm
Structuring radius
 Down to 50 µm
Format Max. 600 mm in diameter (round, square)
Position tolerance Down to ± 3 µm* 
Amount of holes Up to 1000 holes per sec*
Layouts  
Structuring form Round
Position Flexible
Hole morphology Straight
Type Through hole 
Material range**  
D 263® T eco, BOROFLOAT® 33, SCHOTT® AF 35 G  

*) Depending on design
**) Other materials under evaluation

SCHOTT FLEXINITY® mini – Structured Glass Solutions

Standard structuring capabilities*  
Thickness range (depending on glass type) 0.1 – 3.3 mm
Format (Frame) Max. 600 mm in diameter
Size of detached parts Down to 1mm
Layout (outer contour of detached parts) Round, rectangular, free shape
Layout (holes) Through structures according to customer specifications
Outer contour & hole radius Down to 25 μm
Minimum dimensions of structure elements 100 μm
Feature size tolerance < 20 μm (equiv. ± 10 μm)
Position tolerance of features < 20 μm (equiv. ± 10 μm)
Frame size ≥ 10 mm 
*) limitations in feature design and demands deviating from these capabilities will be evaluated upon request

SCHOTT FLEXINITY® level – Structured Glass Solutions

Standard structuring capabilities*  
Glass Types D263® T Eco, BOROFLOAT® 33
Thickness range (depending on glass type) 0.6 – 3.3 mm
Format Max. 600 mm in diameter (round, square)
Layout Non-through structures according to customer specifications; 
can be combined with through structures*
Structuring radius Down to 25 μm
Minimum dimension of structure element 100 μm
Feature size tolerance < 20 μm (equiv. ± 10 μm)
Wall taper angle 90 ° ± 0.5 °
Edge exclusion zone ≥ 3 mm 
Position tolerance of features < 20 μm (equiv. ± 10 μm)
Ridge width between structure elements Down to 100 μm
*) limitations in feature design and demands deviating from these capabilities will be evaluated upon

 

Specifications FLEXINITY® level  
Level Depth range, d1 Min. 0.2 mm*
Remaining Base Thickness, d0 Min. 0.4 mm*
Layout cavity Round, rectangular, free shape
Feature size tolerance (lateral) < 20 μm (equiv. ± 10 μm) 
Position tolerance of features < 20 μm (equiv. ± 10 μm)
Level Depth tolerance < 100 μm (equiv. ± 50 μm)
Level Depth surface texture Matte

 

SCHOTT-FLEXINITY® level-Picture-Schematic sketch - side view of glass

FLEXINITY® materials

SCHOTT FLEXINITY® is available as:

  • D 263® T eco
  • D 263® bio
  • AF 32® eco
  • MEMpax®
  • BOROFLOAT®

To find out more, please see the related materials on the overview page.

Want to know more? Let’s talk

Whether you need more information, samples, a quote, or advice for a project, we would be delighted to talk to you.

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