The drilled glass substrate has a diameter of 150 millimeters. The silicon-glass cube in the final product, a pressure sensor for diesel engines, measures just 5 cubic millimeters.
Top quality for mini-components
Glass substrates used in microsystems have to comply with very high quality standards. SCHOTT Spezialglas AG, Standort Grünenplan has special manufacturing and processing technologies at its disposal. Special grinding and polishing machines, which work on both sides, are used to meet specifications regarding surface quality. Ultrasonic swing lapping technology is used to produce predetermined hole layouts. Closely toleranced drilled holes can be produced in almost any quantity and configuration.
After cleaning, the glass substrates are inspected under clean room conditions (clean room class 1000). The substrates are delivered in special trays so that they can be used without further delay in customers‘ production facilities.
In the “intelligent” car, sensors provide more comfort and safety. High quality glass substrates are used in tiny glass-to-metal-seals which protect the sensors.