High-precision microscope and tool
The electron beam optics and ion beam optics in the CrossBeam workstation Neon 40 with an SEM (Scanning Electron Microscope) and an FIB (Focused Ion Beam) allow for simultaneous observation and preparation of micro- and nano-structured samples. In this photograph, a protective coating is vapor deposited with the help of a gas injection system to allow for a defined amount of material to be removed inside the zone to be prepared (see micro photo to the right).
Conventional preparation methods that previously needed significantly more time or could not be done at all can now be executed and more quickly accomplished with the FIB in the Neon 40. Areas like development and damage analytics will benefit from this. For example, phosphate glasses that are connected to electroconductive glass-to-metal feedthroughs showed signs of deterioration after being stored in a refrigerator, despite the fact that a protective coating against humidity had been applied. Only FIB preparation of a cross section through the corroded surface caused nano scale defects in the layer. Humidity chewed its way through it and caused the glass to dissolve. ”These types of insights enable us to improve the structure, adhesion and chemical stability of the layer and ultimately the entire glass-to-metal compound. In addition, we are able to detect defects more accurately and more quickly for internal and external customers. We are able to answer questions such as, ,What caused the system to fail?, Now, we have just the right magnifying glass we need to do this type of detective work,” Dr. Kuhr notes.
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