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Calcium Fluoride
Product Information
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LITHOTEC® calcium fluoride crystals grown from purest (synthetic) raw material are required for illumination and projection optics in 248 nm, 193 nm and 193 nm immersion micro / lithography technologies and laser applications.
Benefits
LITHOTEC® calcium fluoride crystals complete the application range of optical materials from VUV to IR with very good transmission ranging from 130 nm to 9 µm due to its
- High projection optic quality
- High production volume
- High purity
- High laser durability
- High refractive index homogeneity
- Excellent UV transmittance
- Low stress birefringence
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Key Applications
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The very high laser damage threshold of LITHOTEC® calcium fluoride crystals makes it the first choice material for:
- Excimer laser optics
- Beam delivery
- Illumination systems operating at 45nm node
- Optical systems in lithography, astronomy, photography, HDTV zoom lenses, microscopy
- Sensors (especially IR-spectrum)
- Spectrometers
- Medical lasers
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Forms of Supply
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LITHOTEC® calcium fluoride crystals is offered as component or blank with different crystal orientations (<111>, <100>, random or others on request) along with different surface qualities (raw, cut, ground or polished), depending on the individual requirements.
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Specifications
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The know how of the business segment Advanced Optics Lithography allows the fabrication of CaF2 blanks in diameters up to 350 mm and with thicknesses exceeding 100 mm and highest transmission from 130 nm to 9 ìm (depending on sample thickness).
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Quality Assurance
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There is 100% control of internal quality, including examinations of stress birefringence, striae, bubbles and inclusions, scattering, laser durability and transmittance.
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For further information please contact
our sales team:
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Contact
SCHOTT AG
Division
SCHOTT LITHOTEC
Otto-Schott-Str.13 07745 Jena Germany
 | +49 (0)3641/6812-201 |
 | +49 (0)3641/6812-202 |
E-mail
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