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LITHOTEC® i-line products
Product Information
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LITHOTEC® i-line glass is a type of optical glass which offers both high UV-transmittance at 365 nm and high refractive index homogeneity.
Benefits
LITHOTEC® i-line glass is offered with the following outstanding properties:
- High refractive index homogeneity values (<0.5 ppm at 200 mm diameter)
- Excellent internal quality
- Negligible stress birefringence due to a well-defined annealing process
- Variation of absolute refractive index values per lot of less than 5 x 10-5
- Availability of a wide range of high transmission glass types FK5HT to F14 HT ensures high flexibility in optical designs
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Key Applications
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LITHOTEC® i-line glasses are most often used in applications such as:
- Projection lenses and illumination systems for use in i-line wafer steppers and scanners
- Standard optical applications requiring high transmission in the UV region
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Forms of Supply & Specifications
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LITHOTEC® i-Line glass is available in customized glass is offered in customized forms in accordance to the geometries requested by the customer for discs and plates with the following characteristics:
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Specifications
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LITHOTEC® i-Line glass is offered with:
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Quality Assurance
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LITHOTEC® i-Line glass are subject to a 100% control of homogeneity, stress birefringence, striae, bubbles, and inclusions.
Refractive Index and transmittance are statistically controlled.
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For further information please contact our sales team:
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Contact
SCHOTT AG
Division
SCHOTT LITHOTEC
Otto-Schott-Str.13 07745 Jena Germany
 | +49 (0)3641/6812-201 |
 | +49 (0)3641/6812-202 |
E-mail
More contacts
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