SCHOTT Home
Visitors from North America, please click here... Visitors from North America, please click here to go to
the websites of our US-subsidiaries, they will be able
to serve your needs best.

Sensors / Metrology and Control Engineering

Wafer Positioning
Light guide for wafer positioning
Light guide for wafer positioning
In semiconductor manufacturing, lithography is used to transfer the pattern of circuitry from a photomask - a quartz plate containing the master copy of a microscopic IC - to a wafer, a thin slice of silicon or other semiconductor material on which the Ics are made. To be able to manufacture such Ics lithography strongly depends on the ability to precisely position the wafer.

Light guides are used to position the wafers. These light guides are very complex, in particular as the individual fibers have to be positioned with a precision of 10 µm.

Several light guides are used to illuminate specific spots, other light guides to transport the diffracted light to an electronic unit where the signals are analyzed to position the wafer correctly.



Contact

Lighting and Imaging
SCHOTT AG
Andrea Eisenberger

Otto-Schott-Str. 2
55127 Mainz
Germany
 +49 (0)6131/66-7752
 +49 (0)6131/66-7850
E-mail
More contacts
Trade Fairs & Events

27.11 - 04.12.2009

RSNA

Chicago

10.12 - 13.12.2009

Industrial Automation INDIA

Bombay Exhibition Centre
Western Express Highway
Goregaon East, Mumbai 400 063

23.03 - 25.03.2010

MEDTEC

Stuttgart

21.04 - 22.04.2010

BIOMEDevice

Boston

More trade fairs