IR-MEMS Inspector

An innovative system for MEMS quality inspection

The assembly of micro-electromechanical systems, so called MEMS, is quite a challenge because these components have very fine structures. If dust or micro-particles get into their interiors during bonding, the unit may get damaged. Quality assurance with the help of microscopes is time consuming and inaccurate.

This is not the case with the IR-MEMS Inspector. The system of SCHOTT and Moritex controls MEMS with the help of both visible and infrared light. By doing so, it does not only check the outer surface of the silicon substrate to which a MEMS is applied to, but also its internal quality. Here the inspection system makes use of the fact that silicon transmits infrared light. The substrate is entirely penetrated and inspected for damage in one single step.

The inspection system combines the advantage of a fully automated multi-spectral system with the desire for flexibility and economic efficiency. Scanner and detection software provide a flexible and economical solution for MEMS and semiconductor fabrication.

Features

affordable price
entire waver processing in one step
high resolution with sub- micrometer accuracy
combination of surface-, in-waver-, and bottom side inspection

The IR-MEMS Inspector is a fully automated multi-spectral inspection system that is flexible and economic efficient.

Technical Data

low and high optical magnification: x0.7 - x40
standard lighting: IR and Visible Illumination
optional lighting: UV, usable for surface inspection
double zoom lens and two integrated cameras

Datasheet IR-MEMS Inspector

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Lighting and Imaging
SCHOTT AG

Otto-Schott-Strasse 2
55127 Mainz
Germany

+49(0)6131/66-7752

+49(0)6131/66-7850

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