SCHOTT AG - i-Line Products

i-line Products

Product Information

LITHOTEC^® i-line glass is a type of optical glass which offers both high UV-transmittance at 365 nm and high refractive index homogeneity.

Benefits

LITHOTEC^® i-line glass is offered with the following outstanding properties:

High refractive index homogeneity values (<0.5 ppm at 200 mm diameter)
Excellent internal quality
Negligible stress birefringence due to a well-defined annealing process
Variation of absolute refractive index values per lot of less than 5 x 10^-5
Availability of a wide range of high transmission glass types FK5HT to F14 HT ensures high flexibility in optical designs

Key Applications

LITHOTEC^® i-line glasses are most often used in applications such as:

Projection lenses and illumination systems for use in i-line wafer steppers and scanners
Standard optical applications requiring high transmission in the UV region

Forms of Supply & Specifications

LITHOTEC^® i-Line glass is available in customized glass is offered in customized forms in accordance to the geometries requested by the customer for discs and plates with the following characteristics:

Diameter up to 300 mm
Thickness up to 100 mm
Homogeneity, bubbles/inclusions, dispersion values according to the SCHOTT Optical Glasses catalog

Specifications

LITHOTEC^® i-Line glass is offered with:

Diameter up to 300 mm
Thickness up to 100 mm
Homogeneity, bubbles/inclusions, dispersion values according to the SCHOTT Optical Glasses catalog

Quality Assurance

LITHOTEC^® i-Line glass are subject to a 100% control of homogeneity, stress birefringence, striae, bubbles, and inclusions. Refractive Index and transmittance are statistically controlled.

Print Recommend

Contact

SCHOTT AG
Division
SCHOTT LITHOTEC

Otto-Schott-Str.13
07745 Jena
Germany

+49 (0)3641/6812-201

+49 (0)3641/6812-202

E-mail

More contacts