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Fused Silica


Product Information

Fused Silica LITHOSIL®

Synthetic fused silica with excellent optical properties is particularly suitable for the highly demanding applications found in the optical industry. Different quality levels can be adapted to all kinds of individual customers' needs, from NIR (IR) to DUV.

Synthetic fused silica has the following outstanding properties:
  • Free of inclusions and bubbles
  • Excellent UV transmittance from 185 nm to 2.5 µm
  • High laser durability
  • High refractive index homogeneity: additional 3D option
  • High temperature stability
  • Low stress birefringence
  • Very low thermal expansion coefficient
  • Very low fluorescence


Benefits

The amorphous synthetic fused silica with high purity completes the application range of optical materials from DUV to IR with a very good transmission ranging from 185 nm to 2.5 µm.

Key Applications

Synthetic fused silica is used in the following applications:
  • Micro-/Lithographic applications: stepper lenses, photo mask blanks
  • DUV laser components
  • Standard optics
  • Excimer laser optics
  • Litho optics
  • Beam deliveries
  • Light pipes
  • Laser fusion
  • Technical usage


Forms of Supply

Synthetic fused silica is offered as component or blank in different grades along with different surface qualities (raw, cut, ground or polished), depending on the individual requirements of the customers.

If you are interested in high precision optical components made of fused silica, please check here about our options or contact us.

Specifications

Grades:
Different material grades are characterized in the functional direction by:
  • Very low inclusion / bubble levels
  • Low levels of refractive index variations and local in-homogeneities especially striae
Excimer Grades:
Excimer laser optics require fused silica of the following exceptional qualities:
  • High internal transmission, wide spectral UV-range
  • Very low fluorescence (qualified by laser induced fluorescence at 193 nm).
    Excimer grades are available
3D Material
  • Refractive index homogeneity qualified in all three dimensions depending on geometry
  • 3D Material is available on request


Quality Assurance

Synthetic fused silica is offered with 100% control of homogeneity, stress birefringence, striae, bubbles, and inclusions. We utilize statistical control of refractive index, transmittance, laser induced fluorescence, trace-elements and OH-content.



Contact

Advanced Optics
SCHOTT AG

Hattenbergstrasse 10
55122 Mainz
Germany
 +49 (0) 6131/661812
 +49 (0)3641/2888-9047
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